A Novel Method And System For Calibrating The Spring Constant Of Atomic Force Microscope Cantilever Based On Electromagnetic Actuation

It is crucial to calibrate atomic force microscope (AFM) cantilevers for the development and further applications of AFM in precision engineering such as nanonewton force measurement. This paper presents a novel approach to calibrate the spring constant of an AFM cantilever based on electromagnetic actuation and null position measurement. According to the method, a calibration system was designed. In order to optimize the static and dynamic characteristics of the calibration system, the analytical models for the electromagnetic force and the suspension mechanism stiffness have been developed. Finite element analysis has been utilized to further investigate the precision of analytical modeling. The null position measurement method was utilized to monitor the deformation of the flexible beam, and then the deformation was compensated by the electromagnetic force. Experiments were carried out based on the developed prototype, and the results show that the electromagnetic force conversion rate is 40.08 mu N/mA. Finally, a typical AFM cantilever was calibrated and the spring constant is (30.83 +/- 0.24) N/m. The uncertainty of the proposed null position measurement method is better than 0.78%, which verifies the effectiveness and feasibility of the calibration method and system. Published by AIP Publishing.