Resonance characteristics of localized plasmonic structures with periodic ZnO nano-patterns

Localized plasmonic structures with the periodic ZnO nano-patterns are demonstrated to increase the sensing characteristics of plasmonic sensor. The ZnO nano-patterns with 30 and 50 nm thicknesses are formed on the Au thin film of 50 nm, which have the periodic nano-patterns of 300 nm. Localized plasmonic structures are optimized using the three-dimensional finite-difference time-domain method as a function of incident angle for the width and thickness of the ZnO nano-structures. Localized plasmonic structures with the periodic ZnO nano-holes are fabricated using the double exposure technique by laser interference lithography. The measured resonance angles of 47.5° and 54° are obtained in the localized plasmonic structures with the periodic ZnO nano-patterns of 30 and 50 nm thicknesses, respectively.