Modification of Zinc-Implanted Silicon by Swift Xenon Ion Irradiation

50 keV 64 Zn + ions to a dose of 5 × 10 16 cm –2 are implanted into substrates of single-crystal n -type silicon. Then the samples are irradiated at room temperature with 167 MeV 132 Xe 26+ ions with a fluence ranging from 1 ×10 12 up to 5 × 10 14 cm –2 . Changes in the structure and properties on the sample surface and in its body are studied by scanning electron microscopy, energy dispersive microanalysis, atomic force microscopy, time-of-flight secondary ion mass spectrometry, and photoluminescence.