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Spray-On Liquid-Metal Electrodes For Graphene Field-Effect Transistors

MICROMACHINES(2019)

引用 14|浏览14
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摘要
Advancements in flexible circuit interconnects are critical for widespread adoption of flexible electronics. Non-toxic liquid-metals offer a viable solution for flexible electrodes due to deformability and low bulk resistivity. However, fabrication processes utilizing liquid-metals suffer from high complexity, low throughput, and significant production cost. Our team utilized an inexpensive spray-on stencil technique to deposit liquid-metal Galinstan electrodes in top-gated graphene field-effect transistors (GFETs). The electrode stencils were patterned using an automated vinyl cutter and positioned directly onto chemical vapor deposition (CVD) graphene transferred to polyethylene terephthalate (PET) substrates. Our spray-on method exhibited a throughput of 28 transistors in under five minutes on the same graphene sample, with a 96% yield for all devices down to a channel length of 50 m. The fabricated transistors possess hole and electron mobilities of 663.5 cm(2)/(Vs) and 689.9 cm(2)/(Vs), respectively, and support a simple and effective method of developing high-yield flexible electronics.
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关键词
graphene,Galinstan,Liquid-Metal,spray-on,aerosol,honey,mobility,contact resistance,TLM,I-V characteristics
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