Stackable Dual-Layer Coil Based On Wafer-Level Transfer Technique For Electromagnetic Energy Harvester

Yufeng Wang,Qian Zhang,Lurui Zhao,Anton Shkel,Yongkui Tang,Eun Sok Kim

2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)（2016）

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摘要

This paper reports a stackable dual layer coil based on ZnO sacrificial layer and thermal-release-tape transfer technique for electromagnetic energy harvester. The power density of electromagnetic energy harvester can be improved significantly using multilayer coil with high coil turns. Five of microfabricated dual-layer coil plates are stacked for 450 turns for an electromagnetic vibration-energy harvester, which produces 116 mu W from 3.6 g vibration at resonant frequency of 160 Hz.

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关键词

stackable dual-layer coil,wafer-level transfer technique,thermal-release-tape transfer technique,power density,multilayer coil,microfabricated dual-layer coil plates,electromagnetic vibration-energy harvester,resonant frequency

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