Photonic hybrid assembly through flexible waveguides
Proceedings of SPIE(2016)
摘要
Fully automated, high precision, cost-effective assembly technology for photonic packages remains one of the main challenges in photonic component manufacturing. Next to the cost aspect the most demanding assembly task for multi port photonic integrated circuits (PICs) is the high-precision ( 0.1 ttm) alignment and fixing required for optical I/O in InP PICs, even with waveguide spot size conversion. In a European research initiative PHASTFlex - we develop and investigate an innovative, novel assembly concept, in which the waveguides in a matching TriPleX interposer PIC are released during fabrication to make them movable. After assembly of both chips by flip-chip bonding on a common carrier, TriPleX based actuators and clamping functions position and fix the flexible waveguides with the required accuracy.
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关键词
Photonic assembly,photonic integrated circuit,MEMS,eutectic bonding,InP,TriPleX,LTCC,flip-chip
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