Characterization of X-ray charge neutralizer using carbon-nanotube field emitter

An X-ray charge neutralizer using a screen-printed carbon-nanotube field emitter is demonstrated to show the possibility of a large-area flat-panel charge neutralizer, although the device dimensions in the present work are not very large. The X-ray yields and spectra are characterized to estimate the ion generation rate as one of the figures of merit of neutralizers. Charge neutralization characteristics are measured and show good performance. (C) 2016 The Japan Society of Applied Physics