Nano-scale Boron Mapping in Silicon Devices Using C s -corrected STEM-EELSN. Nakanishi, H. Arie,Yorinobu Kunimune,Takashi Ide,Yukinori Hirose,Nobuyoshi Hattori,T. KoyamaThe Japan Society of Applied Physics(2011)引用 0|浏览6暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要