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Dielectric relaxation and conduction mechanisms in sprayed TiO2 thin films as a function of the annealing temperature

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, no. 4 (2016): 359

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Abstract

The electrical properties of TiO2 thin films deposited by chemical spray pyrolysis onto Si substrates were investigated in the metal-oxide-semiconductor (MOS) configuration using current-voltage characteristics and impedance spectroscopy. The electrical properties were analyzed in relation to the changes in microstructure induced during a...More

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Albert Juma
Albert Juma
Albert Juma
Albert Juma
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