Suppression of Short Channel Hump of nMOSFET Using NF3-Added ILD HDP ProcessJoo-Seog Park, Se-Kyung Choi,Myung-Jong Bong, Seok-Chul Chung,Hyuck-Chai Jung,Namsung Kim, Tae-Un Youn,Young-Woo Kwon,Il-Gweon KimThe Japan Society of Applied Physics(2002)引用 0|浏览7暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要