Prevention of degradation in poly Si1-xGex/high K structure by controlling Ge content in poly Si1-xGex filmsS. K. Kang,J. H. Yoo,B. G. Min, S. W. Nam,Dae-Hong Ko, H. B. Kang, C. W. Yang, M.-H. ChoThe Japan Society of Applied Physics（2002）引用 0|浏览1暂无评分AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
