Analysis of interface structures by quantitative HRTEM

This paper reviews the method of 'quantitative' HRTEM (high-resolution transmission electron microscopy) we have developed to determine the atomistic structure of interfaces. This method includes quantification of error limits for the atom column positions determined by iterative digital image matching. Extending previous work, we introduce a procedure to discriminate between the reliabilities of different types of atom columns in the refined structure. As an example for the application of our method we present results we have obtained analyzing the structure of a Sigma = 3, (111) grain boundary in SrTiO3.