Unified Fabrication Process for Complex Gratings

A unified fabrication process was developed for four complex gratings. One period of each grating contains multiple pairs of ridges/grooves, and a ridge is usually composed of diversified materials. The process was suitable not only for mass fabrication but also for a large area. Moreover, with only one mold, four gratings could be obtained at once. Two 12 x 12 mm(2) samples were fabricated for demonstration. Profile uniformity of each sample was confirmed with broadband infrared (2.5 to 25 mu m) transmittance spectra. A good agreement between measured and modeling results was observed. (C) 2016 Society of Photo-Optical Instrumentation Engineers (SPIE)