An on-machine error calibration method for a laser micromachining tool

Precision Engineering(2017)

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摘要
•A comprehensive calibration method for a micromachining using femtosecond laser.•An increment error model is established to evaluate the error distribution.•A simple calibration procedure is developed with hole drilling and groove milling.•The errors of mechanical and optical system are measured and identified on-machine.
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关键词
Geometric error,Femtosecond laser,On-machine measurement,Error compensation
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