Microstructural response of InGaN to swift heavy ion irradiation

A monocrystalline In0.18Ga0.82N film of ∼275nm in thickness grown on a GaN/Al2O3 substrate was irradiated with 290MeV 238U32+ ions to a fluence of 1.2×1012cm−2 at room temperature. The irradiated sample was characterized using helium ion microscopy (HIM), Rutherford backscattering spectrometry under ion-channeling conditions (RBS/C), and high-resolution X-ray diffraction (HRXRD). The irradiation leads to formation of ion tracks throughout the thin In0.18Ga0.82N film and the 3.0μm thick GaN buffer layer. The mean diameter of the tracks in In0.18Ga0.82N is ∼9nm, as determined by HIM examination. Combination of the HIM and RBS/C data suggests that the In0.18Ga0.82N material in the track is likely to be highly disordered or fully amorphized. The irradiation induced lattice relaxation in In0.18Ga0.82N and a distribution of d-spacing of the (0002) planes in GaN with lattice expansion are observed by HRXRD.