3-D Integrated Electronic Microplate Platform for Low-Cost Repeatable Biosensing Applications

Muneeb Zia,Taiyun Chi,Jong Seok Park,Amy Su,Joe L. Gonzalez,Paul K. Jo,Mark P. Styczynski,Hua Wang,Muhannad S. Bakir

IEEE Transactions on Components, Packaging and Manufacturing Technology（2016）

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摘要

This paper presents a 3-D integrated disposable “electronic microplate” (e-microplate) platform that allows the reuse of CMOS biosensor, thereby significantly reducing cost and increasing throughput compared to nondisposable biosensing systems. The e-microplate utilizes mechanically flexible interconnects and through-silicon-vias to electrically connect the cells cultured on the top (sensing elect...

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关键词

Biosensors,Electrodes,Surface impedance,Microplates,Noise measurement,Surface treatment,Three-dimensional displays

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