Force Feedback Control System Dedicated for Robin Heart Surgical Robot

3D contact force sensors were developed and integrated in a demonstration system for testing the feasibility of their application in minimal invasive surgery (MIS). Piezoresistive MEMS based vectorial force sensors were designed and fabricated by 3D silicon micromachining technology and packaged according to their proposed transducer and sensor applications. In this work we demonstrated the integrability and functional applicability of the 3D force sensors in MIS robotic systems to improve their flexibility and reliability by providing real-time force and tactile information during the operation.