Sequential PLD in oxygen/argon gas mixture of Al-doped ZnO thin films with improved electrical and optical properties

Tudor Coman,Daniel Timpu,Valentin Nica,Catalin Vitelaru,Alicia Petronela Rambu,George Stoian,Mihaela Olaru,Cristian Ursu

Applied Surface Science（2017）

引用 31|浏览4

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摘要

•SPLD at room temperature of highly conductive transparent Al-doped ZnO thin films.•Carrier concentration and mobility increases by using an oxygen/argon gas mixture.•Structural, electrical and optical properties with oxygen/argon pressure ratio.

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关键词

Al-doped ZnO thin films,Sequential PLD,Room temperature deposition

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