Improved irradiation tolerance of W thin films with homogeneously multilayered structure

Surface and Coatings Technology(2017)

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摘要
We report an improved irradiation tolerance of W films by utilizing homogeneously multilayered (HM) structure design. The HM-W film was fabricated by multi-step sputtering, in which the grain boundary density λ could be increased by decreasing the individual layer thickness Pm of the film. The HM structure can improve the film irradiation resistance, in which both He bubble density ρ and average size δ continuously decreased with decreasing Pm. Meanwhile, the irradiation hardening was alleviated by decreasing Pm, while the irradiation-induced phase transition was insensitive to Pm. Our study could provide a promising way to modify the structures of thin films to promote their irradiation resistance.
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关键词
W film,Irradiation,Multilayer,Magnetron sputtering
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