Acceptance angle measurement of CMUTs and PZT ultrasonic transducers

Capacitive micromachined ultrasonic transducer (CMUT) has shown many advantages and is an alternative to lead zirconate titanate (PZT) ultrasonic transducer, especially in biomedical imaging applications. Photoacoustic tomography (PAT) is a developing technique that provides the information of optics and ultrasound. Acceptance angle is a key factor in PAT imaging reconstruction. We evaluated the acceptance angle of our fabricated CMUTs and commercial PZT ultrasonic transducers and the measurement results showed that the CMUTs owned wide acceptance angles, which suggested that CMUT has the potential to improve the imaging quality in PAT.