Humidity sensor based on the ionic polymer metal composite

Sensors and Actuators B: Chemical(2017)

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摘要
•A novel method for fabrication of an ionic polymer-metal composite-based humidity sensor.•A “physical approach strategy” to optimize the IPMC fabrication.•Thorough examining the humidity sensor in terms of sensitivity and response times.•Calibration of humidity response at different deflection of the actuator.
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关键词
IPMC sensing,Sputtering deposition method,Au electrode,Humidity sensor
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