High-Power High-Isolation RF-MEMS Switches With Enhanced Hot-Switching Reliability Using a Shunt Protection Technique

IEEE Transactions on Microwave Theory and Techniques(2017)

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摘要
This paper presents a shunt protection technique to improve the hot-switching reliability of metal-contact radio-frequency microelectromechanical systems (RF-MEMS) switches. The proposed technique places shunt protection contacts in front of the main contact of an RF-MEMS metal contact switch to block RF signal while the main contact is switching ON or OFF. The shunt protection contact creates a l...
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关键词
Contacts,Switches,Radio frequency,Electrodes,Reliability,Shunts (electrical),Metals
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