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Depth-prediction method for direct laser-scribing processes

Applied Surface Science(2017)

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摘要
•New method for predicting the depth of a scribe done with pulsed lasers.•The method is based in the Lambert-Beer’s law for single and overlapped laser pulses.•The proposed method is simple to implement and easy to use.•Experimental data on two different transparent conductive oxides supports the method.
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关键词
Laser processing,Transparent conductive oxides (TCO)
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