Equipment Utilization Enhancement in Photolithography Area Through a Dynamic System Control Using Multi-Fidelity Simulation Optimization With Big Data Technique

Photolithographic (Photo) plays a key role in semiconductor manufacturing because of its importance to advanced process shrinking. Even with a small improvement in its operational efficiency, the cost competitiveness in production can be enhanced as a result of the huge amount of share capital cost. However, it is difficult to stabilize the throughput rhythm of Fabs, while keeping a high equipment...