Zeolite-based thermal mass gas sensor with self-identification algorithm
2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)(2017)
摘要
We demonstrate a new operation mode of thermal gas sensor based on thermal mass extraction with identification algorithm. The system is a silicon microstructure covered with zeolites operated at constant temperature while stimulated by heat pseudo-random sequence. The proposed detection principle is demonstrated at room temperature and atmospheric pressure through the detection of gas water molecules with an hydrophilic FAU-type zeolite coating.
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关键词
gas sensor,zeolites,thermal mass,identification algorithm
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