MBE growth of few-layer 2H-MoTe 2 on 3D substrates

•First, MBE growth of MoTe2 on CaF2.•First, grazing incidence and temperature dependent XRD on MBE grown 2H-MoTe2.•First work hypothesizing excess Te incorporation in MBE grown few-layer 2H-MoTe2.•First, compilation of lattice constants by several techniques on MBE 2H-MoTe2.•Controllability of 2D layers using RHEED oscillations is also presented here.