Non-Linear Frequency Noise Modulation in a Resonant MEMS Accelerometer
IEEE Sensors Journal(2017)
摘要
Resonant MEMS accelerometers offer the potential for very high resolution and wide bandwidth measurements over a large input dynamic range. The read-out is implemented by constructing an oscillator with the resonator as the primary frequency determining element. The noise of this oscillator front-end typically determines the resolution of the device, and the noise floor is set by the modulation of...
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关键词
Accelerometers,Resonant frequency,Sensors,Oscillators,Micromechanical devices,Acceleration,Frequency measurement
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