Surface Textured Silicon Single-Photon Avalanche Diode

Kai Zang,Xun Ding,Xiao Jiang,Yijie Huo,Matthew Morea,Xiaochi Chen,Ching-Ying Lu,Muyu Xue,Yusi Chen,Colleen Shang,Theodore I. Kamins,Qiang Zhang,Jian-Wei Pan,James S. Harris

2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)（2017）

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摘要

We present a surface textured Si SPAD with improved detection efficiency and without sacrificing dark count rate or jitter distribution. Texturing reduces reflection, allows weak light trapping and is CMOS and lithography compatible.

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关键词

silicon single-photon avalanche diode,improved detection efficiency,dark count rate,jitter distribution,texturing,weak light trapping,SPAD,surface texture,CMOS,lithography,Si

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