A high-flux-density hollow cathode plasma source for the studies on plasma surface interactions

Wei Jin,Chuanhui Liang,Haiyan Xu,Fujun Gou,Xiaochun Ma,Dongping Wang,Chang’an Chen, A.W. Kleijn

Fusion Engineering and Design（2017）

引用 4|浏览3

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摘要

•The plasma source provides high ion flux density for H2/He/N2/Ar, with simple structure, high gas and energy efficiency.•The systematic scanning for the performaces of hollow cathode have been studied based on argon discharges.

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关键词

Hollow cathode discharge,Argon/hydrogen/helium plasmas,Plasma surface interaction

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