Preliminary design of an impedance matching circuit for a high power rectangular RF driven ion source

Fusion Engineering and Design(2017)

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摘要
Within the framework for the development of a radio frequency driven positive ion source for fusion applications, KAERI is currently constructing a new high power large area radio frequency ion source. An impedance matching circuit maximizing the power transfer to a plasma in the ion source, while taking into account the technical feasibility, is preliminarily designed at a conceptual level. In order to estimate the plasma load impedance and design parameters, an integrated model composed of the hydrogen plasma global model, the two-dimensional electromagnetic model, the relative plasma dielectric constant calculation module, and the impedance matching circuit module is developed for the ion source with a rectangular tube geometry. By employing this design model, the design parameters dependent on RF input powers of up to 50kW are investigated and the preliminary design is assessed.
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关键词
RF driven ion source,Inductively coupled plasma,Impedance matching,Neutral beam injection
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