Array of Microfluidic Beam Resonators for Density and Viscosity Analysis of Liquids

This paper reports on the design, fabrication, and evaluation of a mass density and viscosity sensor based on an array of polysilicon microbeam resonators integrated with 20 pL fluidic microchannels. When filled with water, resonators exhibit resonant frequencies close to 500 KHz and Q-factor values of 400 operating at atmospheric pressure and ambient temperature. Real-time measurements are highly...