Multi-level switching in TiOxFy film with nanoparticles

A reliable bipolar resistive switching device was achieved with multi-level switching behavior in fluorine-doped titanium oxide (TiOxFy) film. Different resistance states can be precisely controlled by different pulse voltages, which reveals the device's high potential in neuromorphic research. The characteristics of I-V curves in each resistance state were analyzed. Nanoparticles were observed in the TiOxFy film by HR-TEM. The underlying physical mechanisms during resistance switching are discussed and a model of a meshy conducting path is proposed.