Microscale Liquid Marble-Based Tilt Motion Sensor Using Optical Fiber Fabry-Perot Interference
2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)(2017)
摘要
We demonstrate a miniature and low-cost liquid marble-based optical fiber tilt angle sensor prototype with advantages of simple fabrication, immunity to electromagnetic interference, high linearity and available differential detection by using Fabry-Perot (F-P) interferometric detection. A mercury marble, working as a light reflector, is dispensed into a capillary tube preprocessed by hydrophobic agent. The gravitational acceleration solved by tilt angle in the range of 0-90 degrees exhibits a fitted linear sensitivity of 3.72 mu m/ms(-2), in agreement well with the governing model incorporating with the effect of contact angle hysteresis between the droplet and the substrate.
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关键词
Liquid marble, tilt measurement, optical fiber sensor, and Fabry-Perot interference
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