Origin and Optimization of RF Power Handling Limitations in Inline Phase-Change Switches

The power handling capabilities of inline phase-change switches (IPCS's) at radio frequencies (RF) have been correlated with the dc threshold voltage (Vth) of the devices. The dependence of Vth on microheater pulsing parameters and device layout has been characterized, accompanied by observation of the size of the amorphous chalcogenide region through scanning transmission electron microscopy. All...