Pulsed Bessel beam-induced high aspect ratio microstructures on diamond substrate for microfluidics and biosensing applications

Diamond substrates and films have been adapted for many uses because of the material's exceptional properties such as the highest thermal conductivity, high mechanical hardness, wide bandgap, very good optical properties, chemical resistance and biocompatibility. On the other hand, in the last few years, the femtosecond (fs) laser technology has seen a considerable growth in scientific and manufacturing communities for its precision and damage free capability [1] enabling the micromachining of different materials for photonics applications [2]. In the case of surface machining of diamond the use of the laser microfabrication technology has been mainly limited to the investigation of the periodical sub-micron ripples observed on the sample surface after laser irradiation [3], and to the generation of channel-like structures with an average depth of less than half micron [4].