Design of Attitude Detection of 2-DOF Ultrasonic Motor Based on Optical Recognition Method

Attitude detection is a key factor, in applications of multi-degree-of-freedom (M-DOF) ultrasonic motor, such as microrobots, optical instrument and detectors. In order to promote control performance of the two-degree-of-freedom (2-DOF) spherical ultrasonic motor with four stators, a novel non-contact type method of rotor attitude detection is proposed. It’s based on optical recognition technology. The construction of 2-DOF spherical ultrasonic motor is introduced, including the optical sensor system. Then mathematical model of the rotor detection is established, to analyze the relationship between relative displacement values and accumulated rotational angels. Finally a solution of detection system is designed. This non-contact method could achieve high accuracy, compactness, and low cost for 2-DOF spherical ultrasonic motor.