High spatial resolution and high brightness ion beam probe for in-situ elemental and isotopic analysis

Tao Long,Stephen W.J. Clement,Zemin Bao,Peizhi Wang,Di Tian,Dunyi Liu

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms（2018）

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摘要

•A high spatial resolution-high brightness ion probe is designed by COMSOL and SIMION.•The energy-normalized brightness of O2- reaches 60 Am−2 sr−1 V−1 with 5 µm beam in diameter.•The ion probe can be installed on SIMS for in-situ elemental and isotopic analysis.

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关键词

High spatial resolution,High brightness,SIMS,Primary column

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