Electron-Beam Evaporated Superconducting Titanium Thin Films for Antenna-Coupled Transition Edge Sensors

Superconducting titanium thin films are good candidates for transition edge sensors. In this paper, we deposit titanium thin films on cooled silicon-on-insulator substrates by using electron-beam evaporation. The deposition rate dependence of the film stress, resistivity, and superconducting transition temperature are presented and analyzed. The relationship between film electrical properties and ...