A Diamond:H/WO3 Metal-Oxide-Semiconductor Field-Effect Transistor

IEEE Electron Device Letters(2018)

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摘要
A p-type Diamond:H/WO3 metal-oxide-semiconductor field-effect transistor (MOSFET) based on surface transfer doping is demonstrated. Using a low-temperature ALD-grown HfO2 as gate insulator, the Diamond:H/WO3 MOSFETs show excellent output characteristics, gate-controllable 2-D hole gas, and low gate leakage current. Long-channel FETs exhibit improved subthreshold behavior but reduced transconductan...
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关键词
Logic gates,Temperature measurement,MOSFET,Diamond,Doping,Fabrication
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