A Compact Single-Cantilever Multicontact RF-MEMS Switch With Enhanced Reliability

Yuhao Liu,Jiansong Liu,Bo Yu,Xiaoguang Liu

IEEE Microwave and Wireless Components Letters（2018）

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摘要

This letter presents a novel cantilever and electrode biasing design of a metal-contact radio frequency microelectromechanical systems (RF-MEMS) switch to integrate multiple contact points in a single cantilever to improve the reliability of the switch. In the design presented in this letter, multiple contact points are integrated in a single cantilever. The contact points are used to conduct RF c...

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关键词

Contacts,Switching circuits,Radio frequency,Reliability,Optical switches,Electrodes

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