Chemical vapor deposition of Mo tubes for fuel cladding applications

Surface and Coatings Technology(2018)

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摘要
Chemical vapor deposition (CVD) techniques have been evaluated for fabrication of free-standing 0.25 mm thick molybdenum tubes with the end goal of nuclear fuel cladding applications. In order to produce tubes with the wall thickness and microstructures desirable for this application, long deposition durations on the order of 50 h with slow deposition rates were employed. A standard CVD method, involving molybdenum pentachloride reduction by hydrogen, as well as a fluidized-bed CVD (FBCVD) method was applied towards these objectives. Characterization of the tubes produced in this manner revealed regions of material with fine grain microstructure and wall thickness suitable for fuel cladding applications, but lacking necessary uniformity across the length of the tubes. A path forward for the production of freestanding molybdenum tubes that possess the desired properties across their entire length has been identified and can be accomplished by future optimization of the deposition system.
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关键词
CVD,FBCVD,g,He,Mo,Ni,SEM,s,sccm,W,XRD,XRF
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