Twin-Slot Antenna-Coupled Superconducting Ti Transition-Edge Sensor at 350 GHz

We have developed four-leg-supported superconducting Ti transition-edge sensors (TES) formed by KOH wet etching. Energy relaxation mechanism is changed from electron–phonon coupling to diffusive phonon after wet etching. The current–voltage curves of the same TES device were measured before and after wet etching. After wet etching, its thermal conductance ( G ) is reduced to 500 pW/K from 8950 pW/K. The measured effective response time ( τ eff ) is 143 μs, about 30 times larger. In addition, we have studied the optical noise equivalent power (NEP) with a cryogenic blackbody in combination with metal-mesh filters to define the radiation bandwidth. The obtained optical NEP is 5 × 10 −16 W/√Hz, which is suitable for ground-based astronomical applications.