Ultrashort Pulsed-Laser Fabrication Of Silicon Moth-Eye Structures For Terahertz Anti-Reflection

Haruyuki Sakurai,Natsuki Nemoto,Kuniaki Konishi,Yuki Sakurai,Nobuhiko Katayama,Tomotake Matsumura,Junji Yumoto,Makoto Kuwata-Gonokami

2018 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)（2018）

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摘要

We fabricate moth-eye anti-reflection structures for the terahertz region on high-resistivity silicon substrates by ultrashort pulsed-laser ablation. We demonstrate 1.4 times increased THz yield from Mg:LN by using the moth-eye structure as an output coupler.

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关键词

terahertz region,high-resistivity silicon substrates,ultrashort pulsed-laser ablation,ultrashort pulsed-laser fabrication,silicon moth-eye structures,moth-eye antireflection structures,terahertz antireflection,output coupler,Mg

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