Integrated electronics for control of large-area piezoelectric arrays for adjustable optics

Margeaux Wallace,Jose Israel Ramirez,Ryan Allured,Zachary R. Prieskorn,Vanessa Marquez, D. N. Burrows,Paul B. Reid,Thomas N. Jackson,Susan Trolier-McKinstry

Sensors and Actuators A: Physical（2018）

引用 4|浏览15

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摘要

•Process demonstrated for integration of ZnO TFTs with a PZT thin film.•Piezoelectric response shown to be controllable via ZnO array electronics.•Integrated electronics with piezoelectrics is a viable solution for adaptive optics.

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关键词

Integrated electronics,Piezoelectric materials,X-ray telescope,PZT,ZnO

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