Ring oscillator yield learning methodologies for CMOS technology research

2018 29TH ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE (ASMC)(2018)

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摘要
We detail the use of ring oscillators (ROs) for yield learning during the research phase of a CMOS technology generation. Failing circuits are located and classified based on electrical analysis of ROs and FETs (Field Effect Transistor) wired out from RO environments.
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关键词
CMOS technology research,ring oscillators,yield learning,research phase,electrical analysis,Field Effect Transistor,FET
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