Precise Measurement of Thin-Film Thickness in 3D-NAND Device with CD-SEM
Journal of Micro/Nanolithography MEMS and MOEMS（2018）
关键词
critical dimension-scanning electron microscope,metrology,thickness measurement,3D-NAND,oxide-nitride-blocking oxide film
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要