Thermal annealing of black phosphorus for etching and protection

Sena Yang,Ansoon Kim, Jaesung Park,Hyuksang Kwon,Phung Thi Lanh,Songwoung Hong,Kyung Joong Kim,Jeong Won Kim

Applied Surface Science（2018）

引用 16|浏览25

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摘要

•A very simple method of thermal annealing to produce stable and thin black phosphorus.•Upon thermal annealing, a P2O5-like protective layer is formed on top of BP flake and eliminates carrier scattering centers.•The surface protection leads to improve BP-based field-effect transistor (FET) performance.

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关键词

Black phosphorus,Air annealing,Surface protection,Field-effect transistors,Surface oxidization and etching

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