Monolithic 3d (M3d) Complementary Metal-Oxide-Semiconductor (Cmos)-Nanoelectromechanical (Nem) Hybrid Circuits

2018 IEEE 2ND ELECTRON DEVICES TECHNOLOGY AND MANUFACTURING CONFERENCE (EDTM 2018)（2018）

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摘要

Monolithic three-dimensional (M3D) complementary metal-oxide-semiconductor (CMOS) and nanoelectromechanical (NEM) hybrid circuits are discussed in terms of performance, energy consumption and chip density.

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关键词

M3D, CMOS and NEM

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