A Laterally Driven MEMS Inertial Switch With Double-Layer Suspended Springs for Improving Single-Axis Sensitivity

A novel laterally driven inertial switch with double-layer springs has been proposed and fabricated by surface micromachining technology for improving single-axial sensitivity. The symmetrical distribution of double-layer suspended springs and the constraint structures limits the displacement of the proof mass in the off-axis sensitive direction under an acceleration disturbance. The ANSYS simulat...