Nanoelectromechanical Disk Resonators as Highly Sensitive Mass Sensors

Vahid Qaradaghi,A. Ramezany,S. Babu,J. B. Lee,Siavash Pourkamali

IEEE Electron Device Letters（2018）

引用 11|浏览6

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摘要

This letter presents electro-thermally actuated nanomechanical disk resonators and characterization of their performance as highly sensitive mass sensors both in air and liquid. Operating in-plane rotational mode, the disk resonator surfaces slide in parallel to the liquid interface, hence minimizing the consequent motion of surrounding liquid and the resulting viscous damping. Disk resonators wit...

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关键词

Resonators,Liquids,Resonant frequency,Frequency measurement,Q-factor,Sensitivity,Lithography

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